常見用途
- 集成電路
- 檢測器/傳感器器件
- MEMS製造
- 光電元件
- 太陽能電池
Oxide / Aluminum Wafer（4" / 6" / 8" / 12"）
| Size of Wafer | Oxide / Aluminum Wafer 4" 6" 8" 12" |
|---|---|
| Type | Oxide Film / Aluminum Film |
| Film Thickness (Å) |
Oxide Film: 1000 Å ~ 20,000 Å
Aluminum Film: 1000 Å ~ 10,000 Å
|
Semicon-grade particle wafer
FOSB
Vacuum seal FOSB
Wafer Type Particle Control（4" / 6" / 8" / 12"）
| No. | Wafer Type |
|---|---|
| 1 | Prime Wafer |
| 2 | New Monitor Wafer |
| 3 | New Test Wafer |
| 4 | New Spacer Wafer |
| 5 | Reclaimed Wafer |
| 6 | Spacer Wafer |
| 7 | Dummy Wafer |
8" / 12" LPD, Particle Size (um) & Particle counts (ea)
| Item | 8" , 12" LPD, Particle Size (um) | 8" , 12" Particle counts (ea) |
|---|---|---|
| 1 | 0.026 | 100 |
| 2 | 0.037 | 100 |
| 3 | 0.045 | 100 |
| 4 | 0.09 | 50-100 |
| 5 | 0.12 | 50-100-200 |
| 6 | 0.2 | 50 |
| 7 | 0.3 | 30 |
| 8 | 1 | 200 |
| 9 | 2 | 2000 |
Silicon Bare Wafer
Wafer
12" Pizza box
| Size of Wafer | Silicon Bare Wafer 4" 6" 8" 12" |
|---|---|
| Type | P type / N type |
| Res | < 0.1 ohm-cm / 0~100 ohm-cm / > 100 ohm-cm |
| Thickness |
4" : 500~600 um T
6" : 600~700 um T
8" : 600~800 um T
>12" : 500~1100 um T
|
| Orientation | (100) |